Growth of Amorphous Silicon Germanium (a-SiGe: H) Alloys Thin Film by PECVD

Publication Name : Indonesian Journal of Physics 15 (2), 39-42, 2004

Citation : 3

Date : 2004


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https://scholar.google.com/scholar?q=+intitle:"Growth of Amorphous Silicon Germanium (a-SiGe: H) Alloys Thin Film by PECVD"

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