Low Pressure Plasma Confined in a Miniature Cylindrical Chamber and Its Application for In-Situ Elemental Analysis

Publication Name : Japanese Journal of Applied Physics 44 (1A), 202-209, 2005

Citation :

Date : 2005


Publication URL
https://scholar.google.com/scholar?q=+intitle:"Low Pressure Plasma Confined in a Miniature Cylindrical Chamber and Its Application for In-Situ Elemental Analysis"