Low pressure plasma confined in a miniature cylindrical chamber and its application for in-situ elemental analysis

Publication Name : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

DOI : 10.1143/JJAP.44.202

Date : January 2005


Publication URL
https://www.scopus.com/record/display.uri?eid=2-s2.0-15544385758&origin=resultslist&sort=plf-f
Type
Journal
ISSN
00214922
Volume
44
Page
202-209