Low-cost monitoring system for laser processing

Publication Name : JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS

DOI : 10.1143/JJAP.41.6411

Date : NOV 2002


Unique techniques to study laser ablation at low cost have been devised and developed to monitor laser processing. The methods of time-resolved spatial distribution, a surface observation technique performed on-line during the laser irradiation, and induced current detection associated with the fast electron propelled from the target are presented.

Type
Journal
ISSN
0021-4922
EISSN
Page
6411 - 6412