Surface characterisation of TiCxN1-x coatings processed by cathodic arc physical vapour deposition: XPS and XRD analysis

a:9:{i:0;s:85:"The properties of titanium carbonitride (TiCN) can be controlled by maintaining the C";i:1;s:1:"?";i:2;s:989:"N ratio within the coating to a certain level. An experimental study was carried out to vary the composition and properties of TiCN using cathodic arc physical vapour deposition (CAPVD). The substrate used was tungsten carbide (WC-6Co), which was prepared in-house through a powder metallurgy process. In order to form the TiCxN1 - x coatings, titanium (Ti) was used as the cathode, while methane (CH4) and nitrogen (N-2) gases were used as sources for C and N, respectively. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) were used to investigate the composition, chemical state, and bonding structure of the deposited coatings. The results show that the composition, intensity of elements, lattice parameter, and d-value of TiCxN1 - x coatings were successfully varied by controlling the CH4 fraction (CH4/N-2 ratio). With the increase in CH4 fraction, the intensity of C and N within the TiCxN1 - x coatings increased and decreased, respectively. Consequently, the C";i:3;s:1:"?";i:4;s:8:"Ti and C";i:5;s:1:"?";i:6;s:28:"N bonds were increased and N";i:7;s:1:"?";i:8;s:24:"Ti bonds were decreased.";}